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Design and Optimization of a Pressure Sensor Based on Serpentine-Shaped Graphene Piezoresistors for Measuring Low Pressure

This thesis describes a novel microelectromechanical system (MEMS) piezoresistive pressure sensor based on serpentine-shaped graphene piezoresistors paired with trapezoidal prisms under the diaphragm for measuring low pressure. The finite element method (FEM) is utilized to analyze the mechanical st...

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Detalles Bibliográficos
Autores principales:	Ren, Xincheng, Liu, Xianyun, Su, Xin, Jiang, Xingfang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9269475/ https://www.ncbi.nlm.nih.gov/pubmed/35808432 http://dx.doi.org/10.3390/s22134937

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