Capacitive humidity sensing properties of freestanding bendable porous SiO(2)/Si thin films

The fabrication of freestanding bendable films without polymer substrates is demonstrated as a capacitive humidity-sensing material. The bendable and porous SiO(2)/Si films are simply prepared by electrochemical-assisted stripping, metal-assisted chemical etching, followed by oxidation procedures. T...

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Autores principales: Park, Soobin, Seo, Jinmyeong, Park, Jungjoon, Hwang, Inseong, Lee, Han-Seung, Jung, Hyunsung, Yoo, Bongyoung
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9270390/
https://www.ncbi.nlm.nih.gov/pubmed/35804095
http://dx.doi.org/10.1038/s41598-022-15955-4
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author Park, Soobin
Seo, Jinmyeong
Park, Jungjoon
Hwang, Inseong
Lee, Han-Seung
Jung, Hyunsung
Yoo, Bongyoung
author_facet Park, Soobin
Seo, Jinmyeong
Park, Jungjoon
Hwang, Inseong
Lee, Han-Seung
Jung, Hyunsung
Yoo, Bongyoung
author_sort Park, Soobin
collection PubMed
description The fabrication of freestanding bendable films without polymer substrates is demonstrated as a capacitive humidity-sensing material. The bendable and porous SiO(2)/Si films are simply prepared by electrochemical-assisted stripping, metal-assisted chemical etching, followed by oxidation procedures. The capacitive humidity-sensing properties of the fabricated porous SiO(2)/Si film are characterized as a function of the relative humidity and frequency. The remarkable sensing performance is demonstrated in the wide RH range from 13.8 to 79.0%. The sensing behavior of the porous SiO(2)/Si film is studied by electrochemical impedance spectroscopy analysis. Additionally, the reliability of the porous SiO(2)/Si sensing material is confirmed by cyclic and long-term sensing tests.
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spelling pubmed-92703902022-07-10 Capacitive humidity sensing properties of freestanding bendable porous SiO(2)/Si thin films Park, Soobin Seo, Jinmyeong Park, Jungjoon Hwang, Inseong Lee, Han-Seung Jung, Hyunsung Yoo, Bongyoung Sci Rep Article The fabrication of freestanding bendable films without polymer substrates is demonstrated as a capacitive humidity-sensing material. The bendable and porous SiO(2)/Si films are simply prepared by electrochemical-assisted stripping, metal-assisted chemical etching, followed by oxidation procedures. The capacitive humidity-sensing properties of the fabricated porous SiO(2)/Si film are characterized as a function of the relative humidity and frequency. The remarkable sensing performance is demonstrated in the wide RH range from 13.8 to 79.0%. The sensing behavior of the porous SiO(2)/Si film is studied by electrochemical impedance spectroscopy analysis. Additionally, the reliability of the porous SiO(2)/Si sensing material is confirmed by cyclic and long-term sensing tests. Nature Publishing Group UK 2022-07-08 /pmc/articles/PMC9270390/ /pubmed/35804095 http://dx.doi.org/10.1038/s41598-022-15955-4 Text en © The Author(s) 2022 https://creativecommons.org/licenses/by/4.0/Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article's Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article's Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) .
spellingShingle Article
Park, Soobin
Seo, Jinmyeong
Park, Jungjoon
Hwang, Inseong
Lee, Han-Seung
Jung, Hyunsung
Yoo, Bongyoung
Capacitive humidity sensing properties of freestanding bendable porous SiO(2)/Si thin films
title Capacitive humidity sensing properties of freestanding bendable porous SiO(2)/Si thin films
title_full Capacitive humidity sensing properties of freestanding bendable porous SiO(2)/Si thin films
title_fullStr Capacitive humidity sensing properties of freestanding bendable porous SiO(2)/Si thin films
title_full_unstemmed Capacitive humidity sensing properties of freestanding bendable porous SiO(2)/Si thin films
title_short Capacitive humidity sensing properties of freestanding bendable porous SiO(2)/Si thin films
title_sort capacitive humidity sensing properties of freestanding bendable porous sio(2)/si thin films
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9270390/
https://www.ncbi.nlm.nih.gov/pubmed/35804095
http://dx.doi.org/10.1038/s41598-022-15955-4
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