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Capacitive humidity sensing properties of freestanding bendable porous SiO(2)/Si thin films

The fabrication of freestanding bendable films without polymer substrates is demonstrated as a capacitive humidity-sensing material. The bendable and porous SiO(2)/Si films are simply prepared by electrochemical-assisted stripping, metal-assisted chemical etching, followed by oxidation procedures. T...

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Detalles Bibliográficos
Autores principales:	Park, Soobin, Seo, Jinmyeong, Park, Jungjoon, Hwang, Inseong, Lee, Han-Seung, Jung, Hyunsung, Yoo, Bongyoung
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9270390/ https://www.ncbi.nlm.nih.gov/pubmed/35804095 http://dx.doi.org/10.1038/s41598-022-15955-4

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