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Failure modes and mechanisms of layered h-BN under local energy injection
Layered h-BN may serve as an important dielectric and thermal management material in the next-generation nanoelectronics, in which its interactions with electron beam play an important role in device performance and reliability. Previous studies report variations in the failure strength and mode. In...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Nature Publishing Group UK
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9279385/ https://www.ncbi.nlm.nih.gov/pubmed/35831468 http://dx.doi.org/10.1038/s41598-022-16199-y |