Structure and Optical Properties of AlN Crystals Grown by Metal Nitride Vapor Phase Epitaxy with Different V/III Ratios

[Image: see text] The epitaxial aluminum nitride (AlN) crystals were grown on c-plane sapphire using high-temperature metal nitride vapor phase epitaxy at the source materials’ different molar flow ratios (V/III ratios). The effects of various V/III ratios on the surface morphology, crystalline qual...

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Detalles Bibliográficos
Autores principales: Xie, Luxiao, Zhang, Hui, Xie, Xinjian, Wang, Endong, Lin, Xiangyu, Song, Yuxuan, Liu, Guodong, Chen, Guifeng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2022
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9280765/
https://www.ncbi.nlm.nih.gov/pubmed/35847283
http://dx.doi.org/10.1021/acsomega.2c01890

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