Microacoustic Metagratings at Ultra‐High Frequencies Fabricated by Two‐Photon Lithography

The recently proposed bianisotropic acoustic metagratings offer promising opportunities for passive acoustic wavefront manipulation, which is of particular interest in flat acoustic lenses and ultrasound imaging at ultra‐high frequency ultrasound. Despite this fact, acoustic metagratings have never been scaled to MHz frequencies that are common in ultrasound imaging. One of the greatest challenges is the production of complex microscopic structures. Owing to two‐photon polymerization, a novel fabrication technique from the view of acoustic metamaterials, it is now possible to precisely manufacture sub‐wavelength structures in this frequency range. However, shrinking in size poses another challenge; the increasing thermoviscous effects lead to a drop in efficiency and a frequency downshift of the transmission peak and must therefore be taken into account in the design. In this work three microacoustic metagrating designs refracting a normally incident wave toward −35° at 2 MHz are proposed. In order to develop meta‐atoms insensitive to thermoviscous effects shape optimization techniques incorporating the linearized Navier–Stokes equations discretized with finite element method are used. The authors report for the first time microscopic acoustic metamaterials manufactured using two‐photon polymerization and, subsequently, experimentally verify their effectiveness using an optical microphone as a detector in a range from 1.8 to 2.2 MHz.