Low-defect-density WS(2) by hydroxide vapor phase deposition

Two-dimensional (2D) semiconducting monolayers such as transition metal dichalcogenides (TMDs) are promising channel materials to extend Moore’s Law in advanced electronics. Synthetic TMD layers from chemical vapor deposition (CVD) are scalable for fabrication but notorious for their high defect den...

Descripción completa

Detalles Bibliográficos
Autores principales: Wan, Yi, Li, En, Yu, Zhihao, Huang, Jing-Kai, Li, Ming-Yang, Chou, Ang-Sheng, Lee, Yi-Te, Lee, Chien-Ju, Hsu, Hung-Chang, Zhan, Qin, Aljarb, Areej, Fu, Jui-Han, Chiu, Shao-Pin, Wang, Xinran, Lin, Juhn-Jong, Chiu, Ya-Ping, Chang, Wen-Hao, Wang, Han, Shi, Yumeng, Lin, Nian, Cheng, Yingchun, Tung, Vincent, Li, Lain-Jong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9293887/
https://www.ncbi.nlm.nih.gov/pubmed/35851038
http://dx.doi.org/10.1038/s41467-022-31886-0

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9293887/
https://www.ncbi.nlm.nih.gov/pubmed/35851038
http://dx.doi.org/10.1038/s41467-022-31886-0

Ejemplares similares