Fabrication of High-κ Dielectric Metal Oxide Films on Topographically Patterned Substrates: Polymer Brush-Mediated Depositions

[Image: see text] Fabrication of ultrathin films of dielectric (with particular reference to materials with high dielectric constants) materials has significance in many advanced technological applications including hard protective coatings, sensors, and next-generation logic devices. Current state-...

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Detalles Bibliográficos
Autores principales: Yadav, Pravind, Gatensby, Riley, Prochukhan, Nadezda, C. Padmanabhan, Sibu, Davó-Quiñonero, Arantxa, Darragh, Philip, Senthamaraikannan, Ramsankar, Murphy, Bríd, Snelgrove, Matthew, McFeely, Caitlin, Singh, Sajan, Conway, Jim, O’Connor, Robert, McGlynn, Enda, Lundy, Ross, Morris, Michael A.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2022
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9305981/
https://www.ncbi.nlm.nih.gov/pubmed/35797515
http://dx.doi.org/10.1021/acsami.2c07966

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