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Ultra-Precision Cutting and Characterization of Reflective Convex Spherical Blazed Grating Elements
In this work, based on the diffraction principle of reflective blazed grating, the structure size of the convex spherical blazed grating unit is determined, the machining accuracy of the convex spherical blazed grating is formulated, the effects of tool nose radius and Poisson burr on the diffractio...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9315822/ https://www.ncbi.nlm.nih.gov/pubmed/35888933 http://dx.doi.org/10.3390/mi13071115 |
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author | Li, Huang Peng, Xiaoqiang Guan, Chaoliang Hu, Hao |
author_facet | Li, Huang Peng, Xiaoqiang Guan, Chaoliang Hu, Hao |
author_sort | Li, Huang |
collection | PubMed |
description | In this work, based on the diffraction principle of reflective blazed grating, the structure size of the convex spherical blazed grating unit is determined, the machining accuracy of the convex spherical blazed grating is formulated, the effects of tool nose radius and Poisson burr on the diffraction efficiency of the convex spherical blazed grating are analyzed, and the performances of cutting convex gratings with microcrystalline aluminum RSA6061 and RSA6061+ chemically plated NiP for two workpiece materials are compared. A convex spherical blazed grating with a radius of curvature R = 41.104 mm, substrate diameter 14 mm, grating density 53.97 line/mm, and blaze angle of roughly 3.8° is turned by a four-axis ultra-precision machining system by adjustment of the cutting tool, workpiece material, and cutting parameters, as well as modification of the layouts of the blazed grating on the convex sphere. The results of the testing of convex spherical blazed grating elements in both layouts show that the size error of the grating period is close for both layouts, the size error of grating height is smaller in the equal-along-arc layout, the blaze angle error in the equal-along-projection layout is only 0.74%, and the average roughness of the blazed surface is less than 5 nm to meet the processing quality requirements of the reflective convex spherical blazed grating. The greater the blaze angle accuracy of the blazed grating, the higher its diffraction efficiency, so the grating element with an equal-along-projection layout has a higher diffraction efficiency than the grating element with an equal-along-arc layout. RSA6061+ chemically plated NiP material is superior to RSA6061 material in Poisson burr height and blazed surface roughness, which is more suitable for Offner-type imaging spectrometers in the spectral range 0.95–2.5 μm (SWIR). |
format | Online Article Text |
id | pubmed-9315822 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2022 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-93158222022-07-27 Ultra-Precision Cutting and Characterization of Reflective Convex Spherical Blazed Grating Elements Li, Huang Peng, Xiaoqiang Guan, Chaoliang Hu, Hao Micromachines (Basel) Article In this work, based on the diffraction principle of reflective blazed grating, the structure size of the convex spherical blazed grating unit is determined, the machining accuracy of the convex spherical blazed grating is formulated, the effects of tool nose radius and Poisson burr on the diffraction efficiency of the convex spherical blazed grating are analyzed, and the performances of cutting convex gratings with microcrystalline aluminum RSA6061 and RSA6061+ chemically plated NiP for two workpiece materials are compared. A convex spherical blazed grating with a radius of curvature R = 41.104 mm, substrate diameter 14 mm, grating density 53.97 line/mm, and blaze angle of roughly 3.8° is turned by a four-axis ultra-precision machining system by adjustment of the cutting tool, workpiece material, and cutting parameters, as well as modification of the layouts of the blazed grating on the convex sphere. The results of the testing of convex spherical blazed grating elements in both layouts show that the size error of the grating period is close for both layouts, the size error of grating height is smaller in the equal-along-arc layout, the blaze angle error in the equal-along-projection layout is only 0.74%, and the average roughness of the blazed surface is less than 5 nm to meet the processing quality requirements of the reflective convex spherical blazed grating. The greater the blaze angle accuracy of the blazed grating, the higher its diffraction efficiency, so the grating element with an equal-along-projection layout has a higher diffraction efficiency than the grating element with an equal-along-arc layout. RSA6061+ chemically plated NiP material is superior to RSA6061 material in Poisson burr height and blazed surface roughness, which is more suitable for Offner-type imaging spectrometers in the spectral range 0.95–2.5 μm (SWIR). MDPI 2022-07-15 /pmc/articles/PMC9315822/ /pubmed/35888933 http://dx.doi.org/10.3390/mi13071115 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Li, Huang Peng, Xiaoqiang Guan, Chaoliang Hu, Hao Ultra-Precision Cutting and Characterization of Reflective Convex Spherical Blazed Grating Elements |
title | Ultra-Precision Cutting and Characterization of Reflective Convex Spherical Blazed Grating Elements |
title_full | Ultra-Precision Cutting and Characterization of Reflective Convex Spherical Blazed Grating Elements |
title_fullStr | Ultra-Precision Cutting and Characterization of Reflective Convex Spherical Blazed Grating Elements |
title_full_unstemmed | Ultra-Precision Cutting and Characterization of Reflective Convex Spherical Blazed Grating Elements |
title_short | Ultra-Precision Cutting and Characterization of Reflective Convex Spherical Blazed Grating Elements |
title_sort | ultra-precision cutting and characterization of reflective convex spherical blazed grating elements |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9315822/ https://www.ncbi.nlm.nih.gov/pubmed/35888933 http://dx.doi.org/10.3390/mi13071115 |
work_keys_str_mv | AT lihuang ultraprecisioncuttingandcharacterizationofreflectiveconvexsphericalblazedgratingelements AT pengxiaoqiang ultraprecisioncuttingandcharacterizationofreflectiveconvexsphericalblazedgratingelements AT guanchaoliang ultraprecisioncuttingandcharacterizationofreflectiveconvexsphericalblazedgratingelements AT huhao ultraprecisioncuttingandcharacterizationofreflectiveconvexsphericalblazedgratingelements |