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Research on Monocrystalline Silicon Micro-Nano Structures Irradiated by Femtosecond Laser
Femtosecond (fs) laser processing has received great attention for preparing novel micro-nano structures and functional materials. However, the induction mechanism of the micro-nano structures induced by fs lasers still needs to be explored. In this work, the laser-induced periodic surface structure...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9317364/ https://www.ncbi.nlm.nih.gov/pubmed/35888363 http://dx.doi.org/10.3390/ma15144897 |