High-Precision Regulation of Nano-Grating Linewidth Based on ALD

A nano-grating standard with accurate linewidth can not only calibrate the magnification of nano-measurement instruments, but can also enable comparison of linewidths. Unfortunately, it is still a challenging task to control the linewidth of nano-grating standards. Accordingly, in this paper, atomic...

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Detalles Bibliográficos
Autores principales: Zhang, Yaxin, Wang, Chenying, Jing, Weixuan, Wang, Song, Zhang, Yujing, Zhang, Liangliang, Zhang, Yijun, Zhu, Nan, Wang, Yunxiang, Zhao, Yifan, Lin, Qijing, Jiang, Zhuangde
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9318252/
https://www.ncbi.nlm.nih.gov/pubmed/35888812
http://dx.doi.org/10.3390/mi13070995

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