A Direct-Reading MEMS Conductivity Sensor with a Parallel-Symmetric Four-Electrode Configuration

This work proposes a design for a direct-reading conductivity sensor with a parallel symmetrical four-electrode structure, which integrates a silicon-based platinum thin-film strip electrode and a serpentine temperature compensation electrode. The optimal structural parameters of the electrode were...

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Detalles Bibliográficos
Autores principales: Liao, Zhiwei, Jing, Junmin, Gao, Rui, Guo, Yuzhen, Yao, Bin, Zhang, Huiyu, Zhao, Zhou, Zhang, Wenjun, Wang, Yonghua, Zhang, Zengxing, Xue, Chenyang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9319071/
https://www.ncbi.nlm.nih.gov/pubmed/35888969
http://dx.doi.org/10.3390/mi13071153

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9319071/
https://www.ncbi.nlm.nih.gov/pubmed/35888969
http://dx.doi.org/10.3390/mi13071153

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