Tailoring the Hybrid Magnetron Sputtering Process (HiPIMS and dcMS) to Manufacture Ceramic Multilayers: Powering Conditions, Target Materials, and Base Layers

The mechanical and wear behavior of CrN/CrAlN multilayers were improved by tailoring the experimental conditions of a hybrid magnetron sputtering process based on a high-power impulse (HiPIMS) and two direct current magnetron sputtering (dcMS) power supplies. To this end, the influence of the base l...

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Detalles Bibliográficos
Autores principales: de Castilho, Bruno César Noronha Marques, de Sousa Mazuco, Felipe, Rodrigues, Alisson Mendes, Avila, Pedro Renato Tavares, Apolinario, Raira Chefer, Daum, Philipp, da Costa, Fabiana Pereira, Menezes, Romualdo Rodrigues, de Araújo Neves, Gelmires, Greiner, Christian, Pinto, Haroldo Cavalcanti
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9321003/
https://www.ncbi.nlm.nih.gov/pubmed/35889689
http://dx.doi.org/10.3390/nano12142465

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