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Design, Fabrication, and Dynamic Environmental Test of a Piezoresistive Pressure Sensor

Microelectromechanical system (MEMS) pressure sensors have a wide range of applications based on the advantages of mature technology and easy integration. Among them, piezoresistive sensors have attracted great attention with the advantage of simple back-end processing circuits. However, less resear...

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Detalles Bibliográficos
Autores principales:	Gao, Rui, Zhang, Wenjun, Jing, Junmin, Liao, Zhiwei, Zhao, Zhou, Yao, Bin, Zhang, Huiyu, Guo, Yuzhen, Xu, Yanbo, Wang, Yonghua, Zhang, Zengxing, Zhang, Zhidong, Xue, Chenyang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9321605/ https://www.ncbi.nlm.nih.gov/pubmed/35888959 http://dx.doi.org/10.3390/mi13071142

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