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A Method for Broadband Polyimide Permittivity Measurement of Silicon Interposer Applied for High Speed Digital Microsystem

High-speed digital microsystems has emerged as one of the most important solutions for improving system performance, bandwidth, and power consumption. Based on mature micro-system processing technology, a material extraction approach for silicon interposer applied for high-speed digital microsystems...

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Detalles Bibliográficos
Autores principales: Zheng, Zhuoyue, Wang, Yongkun, Han, Lei, Wu, Daowei, Mo, Defeng, Tian, Wenchao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9323850/
https://www.ncbi.nlm.nih.gov/pubmed/35888954
http://dx.doi.org/10.3390/mi13071138