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A Method for Broadband Polyimide Permittivity Measurement of Silicon Interposer Applied for High Speed Digital Microsystem
High-speed digital microsystems has emerged as one of the most important solutions for improving system performance, bandwidth, and power consumption. Based on mature micro-system processing technology, a material extraction approach for silicon interposer applied for high-speed digital microsystems...
Autores principales: | Zheng, Zhuoyue, Wang, Yongkun, Han, Lei, Wu, Daowei, Mo, Defeng, Tian, Wenchao |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9323850/ https://www.ncbi.nlm.nih.gov/pubmed/35888954 http://dx.doi.org/10.3390/mi13071138 |
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