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Dual-Mode Scandium-Aluminum Nitride Lamb-Wave Resonators Using Reconfigurable Periodic Poling
This paper presents the use of ferroelectric behavior in scandium–aluminum nitride (Sc(x)Al(1−x)N) to create dual-mode Lamb-wave resonators for the realization of intrinsically configurable radio-frequency front-end systems. An integrated array of intrinsically switchable dual-mode Lamb-wave resonat...
Autores principales: | Rassay, Sushant, Mo, Dicheng, Tabrizian, Roozbeh |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9324379/ https://www.ncbi.nlm.nih.gov/pubmed/35888820 http://dx.doi.org/10.3390/mi13071003 |
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