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Influence of Pulse Energy and Defocus Amount on the Mechanism and Surface Characteristics of Femtosecond Laser Polishing of SiC Ceramics

SiC ceramics have excellent comprehensive properties and are typical hard and brittle materials that are difficult to process and are widely used in many fields. Laser polishing technology has developed into a new surface processing technology, and femtosecond laser polishing has become an important...

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Autores principales: Zhang, Xuanhua, Chen, Xiaoxiao, Chen, Tao, Ma, Guiying, Zhang, Wenwu, Huang, Lirong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9324907/
https://www.ncbi.nlm.nih.gov/pubmed/35888935
http://dx.doi.org/10.3390/mi13071118
_version_ 1784756917449523200
author Zhang, Xuanhua
Chen, Xiaoxiao
Chen, Tao
Ma, Guiying
Zhang, Wenwu
Huang, Lirong
author_facet Zhang, Xuanhua
Chen, Xiaoxiao
Chen, Tao
Ma, Guiying
Zhang, Wenwu
Huang, Lirong
author_sort Zhang, Xuanhua
collection PubMed
description SiC ceramics have excellent comprehensive properties and are typical hard and brittle materials that are difficult to process and are widely used in many fields. Laser polishing technology has developed into a new surface processing technology, and femtosecond laser polishing has become an important method for the precision machining of hard and brittle materials. In this paper, SiC ceramics were ablated and polished by infrared femtosecond laser, the laser ablation threshold of SiC ceramics was calculated and the influence of pulse energy and defocus amount on the surface morphology, surface roughness, polishing depth and oxidation degree of femtosecond laser polishing of SiC ceramics were investigated. The results show that when the laser repetition frequency f = 175 kHz, wavelength λ = 1064 nm and ablation time t = 9 s, the laser ablation threshold of SiC ceramics is 0.355 J/cm(2). With the increase in pulse energy, the surface roughness first decreased and then increased, and the polishing depth showed an overall upward trend. The change of defocus amount will lead to the change of the laser spot diameter. With the increase of the defocus amount, the laser spot irradiated on the workpiece surface becomes larger, and the laser energy density decreases, which results in the decrease of the laser ablation ability and polishing depth and the increase of the polished surface roughness. Periodic nano-ripple structures appeared on the laser-induced surface. Through Energy Dispersive Spectrometer (EDS) elemental analysis, it was found that there was an oxidation phenomenon in SiC ceramics polished by femtosecond laser in an air environment, and the change of pulse energy and defocus amount had insignificant effects on the degree of oxidation.
format Online
Article
Text
id pubmed-9324907
institution National Center for Biotechnology Information
language English
publishDate 2022
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-93249072022-07-27 Influence of Pulse Energy and Defocus Amount on the Mechanism and Surface Characteristics of Femtosecond Laser Polishing of SiC Ceramics Zhang, Xuanhua Chen, Xiaoxiao Chen, Tao Ma, Guiying Zhang, Wenwu Huang, Lirong Micromachines (Basel) Article SiC ceramics have excellent comprehensive properties and are typical hard and brittle materials that are difficult to process and are widely used in many fields. Laser polishing technology has developed into a new surface processing technology, and femtosecond laser polishing has become an important method for the precision machining of hard and brittle materials. In this paper, SiC ceramics were ablated and polished by infrared femtosecond laser, the laser ablation threshold of SiC ceramics was calculated and the influence of pulse energy and defocus amount on the surface morphology, surface roughness, polishing depth and oxidation degree of femtosecond laser polishing of SiC ceramics were investigated. The results show that when the laser repetition frequency f = 175 kHz, wavelength λ = 1064 nm and ablation time t = 9 s, the laser ablation threshold of SiC ceramics is 0.355 J/cm(2). With the increase in pulse energy, the surface roughness first decreased and then increased, and the polishing depth showed an overall upward trend. The change of defocus amount will lead to the change of the laser spot diameter. With the increase of the defocus amount, the laser spot irradiated on the workpiece surface becomes larger, and the laser energy density decreases, which results in the decrease of the laser ablation ability and polishing depth and the increase of the polished surface roughness. Periodic nano-ripple structures appeared on the laser-induced surface. Through Energy Dispersive Spectrometer (EDS) elemental analysis, it was found that there was an oxidation phenomenon in SiC ceramics polished by femtosecond laser in an air environment, and the change of pulse energy and defocus amount had insignificant effects on the degree of oxidation. MDPI 2022-07-15 /pmc/articles/PMC9324907/ /pubmed/35888935 http://dx.doi.org/10.3390/mi13071118 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Zhang, Xuanhua
Chen, Xiaoxiao
Chen, Tao
Ma, Guiying
Zhang, Wenwu
Huang, Lirong
Influence of Pulse Energy and Defocus Amount on the Mechanism and Surface Characteristics of Femtosecond Laser Polishing of SiC Ceramics
title Influence of Pulse Energy and Defocus Amount on the Mechanism and Surface Characteristics of Femtosecond Laser Polishing of SiC Ceramics
title_full Influence of Pulse Energy and Defocus Amount on the Mechanism and Surface Characteristics of Femtosecond Laser Polishing of SiC Ceramics
title_fullStr Influence of Pulse Energy and Defocus Amount on the Mechanism and Surface Characteristics of Femtosecond Laser Polishing of SiC Ceramics
title_full_unstemmed Influence of Pulse Energy and Defocus Amount on the Mechanism and Surface Characteristics of Femtosecond Laser Polishing of SiC Ceramics
title_short Influence of Pulse Energy and Defocus Amount on the Mechanism and Surface Characteristics of Femtosecond Laser Polishing of SiC Ceramics
title_sort influence of pulse energy and defocus amount on the mechanism and surface characteristics of femtosecond laser polishing of sic ceramics
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9324907/
https://www.ncbi.nlm.nih.gov/pubmed/35888935
http://dx.doi.org/10.3390/mi13071118
work_keys_str_mv AT zhangxuanhua influenceofpulseenergyanddefocusamountonthemechanismandsurfacecharacteristicsoffemtosecondlaserpolishingofsicceramics
AT chenxiaoxiao influenceofpulseenergyanddefocusamountonthemechanismandsurfacecharacteristicsoffemtosecondlaserpolishingofsicceramics
AT chentao influenceofpulseenergyanddefocusamountonthemechanismandsurfacecharacteristicsoffemtosecondlaserpolishingofsicceramics
AT maguiying influenceofpulseenergyanddefocusamountonthemechanismandsurfacecharacteristicsoffemtosecondlaserpolishingofsicceramics
AT zhangwenwu influenceofpulseenergyanddefocusamountonthemechanismandsurfacecharacteristicsoffemtosecondlaserpolishingofsicceramics
AT huanglirong influenceofpulseenergyanddefocusamountonthemechanismandsurfacecharacteristicsoffemtosecondlaserpolishingofsicceramics