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Microwave Plasma-Enhanced Parylene–Metal Multilayer Design from Metal Salts
In this paper, a new approach for the synthesis of Parylene–metal multilayers was examined. The metal layers were derived from a metal salt solution in methanol and a post-drying plasma reduction treatment. This process was designed as a one-pot synthesis, which needs a very low amount of resources...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9330860/ https://www.ncbi.nlm.nih.gov/pubmed/35893510 http://dx.doi.org/10.3390/nano12152540 |
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author | Weber, Mirco Vorobev, David Viöl, Wolfgang |
author_facet | Weber, Mirco Vorobev, David Viöl, Wolfgang |
author_sort | Weber, Mirco |
collection | PubMed |
description | In this paper, a new approach for the synthesis of Parylene–metal multilayers was examined. The metal layers were derived from a metal salt solution in methanol and a post-drying plasma reduction treatment. This process was designed as a one-pot synthesis, which needs a very low amount of resources and energy compared with those using electron beam sputtering processes. The Parylene coatings were obtained after reduction plasma treatments with Parylene C. Therefore, a Parylene coating device with an included plasma microwave generator was used to ensure the character of a one-pot synthesis. This process provided ultra-thin metal salt layers in the range of 1–2 nm for layer thickness and 10–30 nm for larger metal salt agglomerates all over the metal salt layer. The Parylene layers were obtained with thicknesses between approx. 4.5 and 4.7 µm from ellipsometric measurements and 5.7–6.3 µm measured by white light reflectometry. Tensile strength analysis showed an orthogonal pulling stress resistance of around 4500 N. A surface roughness of 4–8 nm for the metal layers, as well as 20–29 nm for the Parylene outer layer, were measured. The wettability for non-polar liquids with a contact angle of 30° was better than for polar liquids, such as water, achieving 87° on the Parylene C surfaces. |
format | Online Article Text |
id | pubmed-9330860 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2022 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-93308602022-07-29 Microwave Plasma-Enhanced Parylene–Metal Multilayer Design from Metal Salts Weber, Mirco Vorobev, David Viöl, Wolfgang Nanomaterials (Basel) Article In this paper, a new approach for the synthesis of Parylene–metal multilayers was examined. The metal layers were derived from a metal salt solution in methanol and a post-drying plasma reduction treatment. This process was designed as a one-pot synthesis, which needs a very low amount of resources and energy compared with those using electron beam sputtering processes. The Parylene coatings were obtained after reduction plasma treatments with Parylene C. Therefore, a Parylene coating device with an included plasma microwave generator was used to ensure the character of a one-pot synthesis. This process provided ultra-thin metal salt layers in the range of 1–2 nm for layer thickness and 10–30 nm for larger metal salt agglomerates all over the metal salt layer. The Parylene layers were obtained with thicknesses between approx. 4.5 and 4.7 µm from ellipsometric measurements and 5.7–6.3 µm measured by white light reflectometry. Tensile strength analysis showed an orthogonal pulling stress resistance of around 4500 N. A surface roughness of 4–8 nm for the metal layers, as well as 20–29 nm for the Parylene outer layer, were measured. The wettability for non-polar liquids with a contact angle of 30° was better than for polar liquids, such as water, achieving 87° on the Parylene C surfaces. MDPI 2022-07-24 /pmc/articles/PMC9330860/ /pubmed/35893510 http://dx.doi.org/10.3390/nano12152540 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Weber, Mirco Vorobev, David Viöl, Wolfgang Microwave Plasma-Enhanced Parylene–Metal Multilayer Design from Metal Salts |
title | Microwave Plasma-Enhanced Parylene–Metal Multilayer Design from Metal Salts |
title_full | Microwave Plasma-Enhanced Parylene–Metal Multilayer Design from Metal Salts |
title_fullStr | Microwave Plasma-Enhanced Parylene–Metal Multilayer Design from Metal Salts |
title_full_unstemmed | Microwave Plasma-Enhanced Parylene–Metal Multilayer Design from Metal Salts |
title_short | Microwave Plasma-Enhanced Parylene–Metal Multilayer Design from Metal Salts |
title_sort | microwave plasma-enhanced parylene–metal multilayer design from metal salts |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9330860/ https://www.ncbi.nlm.nih.gov/pubmed/35893510 http://dx.doi.org/10.3390/nano12152540 |
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