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Microwave Plasma-Enhanced Parylene–Metal Multilayer Design from Metal Salts

In this paper, a new approach for the synthesis of Parylene–metal multilayers was examined. The metal layers were derived from a metal salt solution in methanol and a post-drying plasma reduction treatment. This process was designed as a one-pot synthesis, which needs a very low amount of resources...

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Autores principales: Weber, Mirco, Vorobev, David, Viöl, Wolfgang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9330860/
https://www.ncbi.nlm.nih.gov/pubmed/35893510
http://dx.doi.org/10.3390/nano12152540
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author Weber, Mirco
Vorobev, David
Viöl, Wolfgang
author_facet Weber, Mirco
Vorobev, David
Viöl, Wolfgang
author_sort Weber, Mirco
collection PubMed
description In this paper, a new approach for the synthesis of Parylene–metal multilayers was examined. The metal layers were derived from a metal salt solution in methanol and a post-drying plasma reduction treatment. This process was designed as a one-pot synthesis, which needs a very low amount of resources and energy compared with those using electron beam sputtering processes. The Parylene coatings were obtained after reduction plasma treatments with Parylene C. Therefore, a Parylene coating device with an included plasma microwave generator was used to ensure the character of a one-pot synthesis. This process provided ultra-thin metal salt layers in the range of 1–2 nm for layer thickness and 10–30 nm for larger metal salt agglomerates all over the metal salt layer. The Parylene layers were obtained with thicknesses between approx. 4.5 and 4.7 µm from ellipsometric measurements and 5.7–6.3 µm measured by white light reflectometry. Tensile strength analysis showed an orthogonal pulling stress resistance of around 4500 N. A surface roughness of 4–8 nm for the metal layers, as well as 20–29 nm for the Parylene outer layer, were measured. The wettability for non-polar liquids with a contact angle of 30° was better than for polar liquids, such as water, achieving 87° on the Parylene C surfaces.
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spelling pubmed-93308602022-07-29 Microwave Plasma-Enhanced Parylene–Metal Multilayer Design from Metal Salts Weber, Mirco Vorobev, David Viöl, Wolfgang Nanomaterials (Basel) Article In this paper, a new approach for the synthesis of Parylene–metal multilayers was examined. The metal layers were derived from a metal salt solution in methanol and a post-drying plasma reduction treatment. This process was designed as a one-pot synthesis, which needs a very low amount of resources and energy compared with those using electron beam sputtering processes. The Parylene coatings were obtained after reduction plasma treatments with Parylene C. Therefore, a Parylene coating device with an included plasma microwave generator was used to ensure the character of a one-pot synthesis. This process provided ultra-thin metal salt layers in the range of 1–2 nm for layer thickness and 10–30 nm for larger metal salt agglomerates all over the metal salt layer. The Parylene layers were obtained with thicknesses between approx. 4.5 and 4.7 µm from ellipsometric measurements and 5.7–6.3 µm measured by white light reflectometry. Tensile strength analysis showed an orthogonal pulling stress resistance of around 4500 N. A surface roughness of 4–8 nm for the metal layers, as well as 20–29 nm for the Parylene outer layer, were measured. The wettability for non-polar liquids with a contact angle of 30° was better than for polar liquids, such as water, achieving 87° on the Parylene C surfaces. MDPI 2022-07-24 /pmc/articles/PMC9330860/ /pubmed/35893510 http://dx.doi.org/10.3390/nano12152540 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Weber, Mirco
Vorobev, David
Viöl, Wolfgang
Microwave Plasma-Enhanced Parylene–Metal Multilayer Design from Metal Salts
title Microwave Plasma-Enhanced Parylene–Metal Multilayer Design from Metal Salts
title_full Microwave Plasma-Enhanced Parylene–Metal Multilayer Design from Metal Salts
title_fullStr Microwave Plasma-Enhanced Parylene–Metal Multilayer Design from Metal Salts
title_full_unstemmed Microwave Plasma-Enhanced Parylene–Metal Multilayer Design from Metal Salts
title_short Microwave Plasma-Enhanced Parylene–Metal Multilayer Design from Metal Salts
title_sort microwave plasma-enhanced parylene–metal multilayer design from metal salts
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9330860/
https://www.ncbi.nlm.nih.gov/pubmed/35893510
http://dx.doi.org/10.3390/nano12152540
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