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Comparison of Sb(2)O(3) and Sb(2)O(3)/SiO(2) Double Stacked pH Sensing Membrane Applied in Electrolyte-Insulator-Semiconductor Structure

In this study, electrolyte-insulator-semiconductor (EIS) capacitors with Sb(2)O(3)/SiO(2) double stacked sensing membranes were fabricated with pH sensing capability. The results indicate that Sb(2)O(3)/SiO(2) double stacked membranes with appropriate annealing had better material quality and sensin...

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Detalles Bibliográficos
Autores principales:	Kao, Chyuan-Haur, Chen, Kuan-Lin, Wu, Hui-Ru, Cheng, Yu-Chin, Chen, Cheng-Shan, Chen, Shih-Ming, Lee, Ming-Ling, Chen, Hsiang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9331906/ https://www.ncbi.nlm.nih.gov/pubmed/35893452 http://dx.doi.org/10.3390/membranes12080734

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