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Al(2)O(3) Dot and Antidot Array Synthesis in Hexagonally Packed Poly(styrene-block-methyl methacrylate) Nanometer-Thick Films for Nanostructure Fabrication

[Image: see text] Nanostructured organic templates originating from self-assembled block copolymers (BCPs) can be converted into inorganic nanostructures by sequential infiltration synthesis (SIS). This capability is particularly relevant within the framework of advanced lithographic applications be...

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Detalles Bibliográficos
Autores principales:	Seguini, Gabriele, Motta, Alessia, Bigatti, Marco, Caligiore, Federica E., Rademaker, Guido, Gharbi, Ahmed, Tiron, Raluca, Tallarida, Graziella, Perego, Michele, Cianci, Elena
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	American Chemical Society 2022
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9344376/ https://www.ncbi.nlm.nih.gov/pubmed/35937588 http://dx.doi.org/10.1021/acsanm.2c02013

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