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A statistical method to optimize the chemical etching process of zinc oxide thin films
Zinc oxide (ZnO) is an attractive material for microscale and nanoscale devices. Its desirable semiconductor, piezoelectric and optical properties make it useful in applications ranging from microphones to missile warning systems to biometric sensors. This work introduces a demonstration of blending...
Autores principales: | Lynes, David D., Chandrahalim, Hengky, Brown, Justin M., Singh, Karanvir, Bodily, Kyle T., Leedy, Kevin D. |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
The Royal Society
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9346367/ https://www.ncbi.nlm.nih.gov/pubmed/35950193 http://dx.doi.org/10.1098/rsos.211560 |
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