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A statistical method to optimize the chemical etching process of zinc oxide thin films

Zinc oxide (ZnO) is an attractive material for microscale and nanoscale devices. Its desirable semiconductor, piezoelectric and optical properties make it useful in applications ranging from microphones to missile warning systems to biometric sensors. This work introduces a demonstration of blending...

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Detalles Bibliográficos
Autores principales:	Lynes, David D., Chandrahalim, Hengky, Brown, Justin M., Singh, Karanvir, Bodily, Kyle T., Leedy, Kevin D.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	The Royal Society 2022
Materias:	Chemistry
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9346367/ https://www.ncbi.nlm.nih.gov/pubmed/35950193 http://dx.doi.org/10.1098/rsos.211560

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