Cargando…
BAW Resonator with an Optimized SiO(2)/Ta(2)O(5) Reflector for 5G Applications
[Image: see text] In the present work, a lithium niobate (LN) 43°Y cut LN film is transferred onto a substrate with 11 layers of SiO(2)/Ta(2)O(5) and solidly mounted resonators with a reflector are successfully fabricated with the multilayer structure. The design method and fabrication process are d...
| Autores principales: | , , , , , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
American Chemical Society
2022
|
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9348002/ https://www.ncbi.nlm.nih.gov/pubmed/35935285 http://dx.doi.org/10.1021/acsomega.2c01749 |