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BAW Resonator with an Optimized SiO(2)/Ta(2)O(5) Reflector for 5G Applications

[Image: see text] In the present work, a lithium niobate (LN) 43°Y cut LN film is transferred onto a substrate with 11 layers of SiO(2)/Ta(2)O(5) and solidly mounted resonators with a reflector are successfully fabricated with the multilayer structure. The design method and fabrication process are d...

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Detalles Bibliográficos
Autores principales:	Lv, Lu, Shuai, Yao, Huang, Shitian, Zhu, Dailei, Wang, Yuedong, Luo, Wenbo, Wu, Chuangui, Zhang, Wanli
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	American Chemical Society 2022
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9348002/ https://www.ncbi.nlm.nih.gov/pubmed/35935285 http://dx.doi.org/10.1021/acsomega.2c01749

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