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The Effect of Reactive Sputtering on the Microstructure of Parylene-C

Sputtering technique involves the use of plasma that locally heats surfaces of substrates during the deposition of atoms or molecules. This modifies the microstructure by increasing crystallinity and the adhesive properties of the substrate. In this study, the effect of sputtering on the microstruct...

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Detalles Bibliográficos
Autores principales:	Raji, Akeem, Lee, Ye-Seul, Baek, Seung-Yo, Yoon, Ji-Hyeon, Gasonoo, Akpeko, Lee, Jonghee, Lee, Jae-Hyun
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9369700/ https://www.ncbi.nlm.nih.gov/pubmed/35955139 http://dx.doi.org/10.3390/ma15155203

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