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Fabrication of Silicon Nanowire Sensors for Highly Sensitive pH and DNA Hybridization Detection

A highly sensitive silicon nanowire (SiNW)-based sensor device was developed using electron beam lithography integrated with complementary metal oxide semiconductor (CMOS) technology. The top-down fabrication approach enables the rapid fabrication of device miniaturization with uniform and strictly...

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Detalles Bibliográficos
Autores principales:	Abd Rahman, Siti Fatimah, Yusof, Nor Azah, Md Arshad, Mohd Khairuddin, Hashim, Uda, Md Nor, Mohammad Nuzaihan, Hamidon, Mohd Nizar
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9370444/ https://www.ncbi.nlm.nih.gov/pubmed/35957087 http://dx.doi.org/10.3390/nano12152652

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