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Research on Integral Fabrication and Inner Surface Metallization of the High-Frequency Terahertz Hollow-Core Metal Rectangular Waveguide Cavity by a Combined Process Based on Wire Electrochemical Micromachining and Electrochemical Deposition

With the development of fabrication technology for terahertz rectangular cavity devices, the fabrication process of integral terahertz waveguide cavities has received much attention because of its beneficial effect on improving the transmission of terahertz signals. However, smaller feature sizes, h...

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Autores principales: Bi, Xiaolei, Meng, Lingchao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9412866/
https://www.ncbi.nlm.nih.gov/pubmed/36014267
http://dx.doi.org/10.3390/mi13081346
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author Bi, Xiaolei
Meng, Lingchao
author_facet Bi, Xiaolei
Meng, Lingchao
author_sort Bi, Xiaolei
collection PubMed
description With the development of fabrication technology for terahertz rectangular cavity devices, the fabrication process of integral terahertz waveguide cavities has received much attention because of its beneficial effect on improving the transmission of terahertz signals. However, smaller feature sizes, higher dimensional accuracy, and more stringent requirements for cavity surface roughness and edge radius make it difficult to manufacture terahertz waveguide cavities with a high operating frequency by using existing micro-manufacturing technology. At the same time, the smaller feature size also makes it more difficult to realize uniform metallization on the inner surface of a terahertz waveguide cavity. In this paper, a new and improved combined manufacturing process based on wire electrochemical micromachining and electrochemical deposition is proposed to realize the integral fabrication and uniform metallization of the inner surface of a high-frequency terahertz metal rectangular waveguide cavity. A detailed description and analysis of this combined process are carried out, together with corresponding experimental investigations. An integral 1.7 THz hollow-core metal rectangular waveguide cavity with an end-face size of 165.9 μm × 88.3 μm, an edge radius of less than 10 μm, an internal bottom surface roughness of less than 0.10 μm, and an internal side surface roughness of less than 0.40 μm was manufactured, and high-quality metallization of its inner surface was also achieved.
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spelling pubmed-94128662022-08-27 Research on Integral Fabrication and Inner Surface Metallization of the High-Frequency Terahertz Hollow-Core Metal Rectangular Waveguide Cavity by a Combined Process Based on Wire Electrochemical Micromachining and Electrochemical Deposition Bi, Xiaolei Meng, Lingchao Micromachines (Basel) Article With the development of fabrication technology for terahertz rectangular cavity devices, the fabrication process of integral terahertz waveguide cavities has received much attention because of its beneficial effect on improving the transmission of terahertz signals. However, smaller feature sizes, higher dimensional accuracy, and more stringent requirements for cavity surface roughness and edge radius make it difficult to manufacture terahertz waveguide cavities with a high operating frequency by using existing micro-manufacturing technology. At the same time, the smaller feature size also makes it more difficult to realize uniform metallization on the inner surface of a terahertz waveguide cavity. In this paper, a new and improved combined manufacturing process based on wire electrochemical micromachining and electrochemical deposition is proposed to realize the integral fabrication and uniform metallization of the inner surface of a high-frequency terahertz metal rectangular waveguide cavity. A detailed description and analysis of this combined process are carried out, together with corresponding experimental investigations. An integral 1.7 THz hollow-core metal rectangular waveguide cavity with an end-face size of 165.9 μm × 88.3 μm, an edge radius of less than 10 μm, an internal bottom surface roughness of less than 0.10 μm, and an internal side surface roughness of less than 0.40 μm was manufactured, and high-quality metallization of its inner surface was also achieved. MDPI 2022-08-19 /pmc/articles/PMC9412866/ /pubmed/36014267 http://dx.doi.org/10.3390/mi13081346 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Bi, Xiaolei
Meng, Lingchao
Research on Integral Fabrication and Inner Surface Metallization of the High-Frequency Terahertz Hollow-Core Metal Rectangular Waveguide Cavity by a Combined Process Based on Wire Electrochemical Micromachining and Electrochemical Deposition
title Research on Integral Fabrication and Inner Surface Metallization of the High-Frequency Terahertz Hollow-Core Metal Rectangular Waveguide Cavity by a Combined Process Based on Wire Electrochemical Micromachining and Electrochemical Deposition
title_full Research on Integral Fabrication and Inner Surface Metallization of the High-Frequency Terahertz Hollow-Core Metal Rectangular Waveguide Cavity by a Combined Process Based on Wire Electrochemical Micromachining and Electrochemical Deposition
title_fullStr Research on Integral Fabrication and Inner Surface Metallization of the High-Frequency Terahertz Hollow-Core Metal Rectangular Waveguide Cavity by a Combined Process Based on Wire Electrochemical Micromachining and Electrochemical Deposition
title_full_unstemmed Research on Integral Fabrication and Inner Surface Metallization of the High-Frequency Terahertz Hollow-Core Metal Rectangular Waveguide Cavity by a Combined Process Based on Wire Electrochemical Micromachining and Electrochemical Deposition
title_short Research on Integral Fabrication and Inner Surface Metallization of the High-Frequency Terahertz Hollow-Core Metal Rectangular Waveguide Cavity by a Combined Process Based on Wire Electrochemical Micromachining and Electrochemical Deposition
title_sort research on integral fabrication and inner surface metallization of the high-frequency terahertz hollow-core metal rectangular waveguide cavity by a combined process based on wire electrochemical micromachining and electrochemical deposition
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9412866/
https://www.ncbi.nlm.nih.gov/pubmed/36014267
http://dx.doi.org/10.3390/mi13081346
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