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Design and Fabrication of High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Based on an AlN Thin Film

A piezoelectric micromachined ultrasonic transducer (PMUT) is a microelectromechanical system (MEMS) device that can transmit and receive ultrasonic waves. Given its advantages of high-frequency ultrasound with good directionality and high resolution, PMUT can be used in application scenarios with l...

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Detalles Bibliográficos
Autores principales:	Zang, Junbin, Fan, Zheng, Li, Penglu, Duan, Xiaoya, Wu, Chunsheng, Cui, Danfeng, Xue, Chenyang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9413500/ https://www.ncbi.nlm.nih.gov/pubmed/36014238 http://dx.doi.org/10.3390/mi13081317

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