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Evaluation of Adhesion Properties of Thin Film Structure through Surface Acoustic Wave Dispersion Simulation

A theoretical simulation study of the dispersion characteristic of the surface acoustic wave (Rayleigh wave) was conducted by modeling the adhesion interlayer with stiffness coefficients to evaluate the bonding properties of nano-scale thin film structures. For experimental validation, a set of thin...

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Detalles Bibliográficos
Autores principales:	Choi, Yu Min, Kang, Dongchan, Kim, Jeong Nyeon, Park, Ik Keun
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9413970/ https://www.ncbi.nlm.nih.gov/pubmed/36013773 http://dx.doi.org/10.3390/ma15165637

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