Combination of Micro-Corrugation Process and Pre-Stretched Method for Highly Stretchable Vertical Wavy Structured Metal Interconnects

Metal interconnects with a vertical wavy structure have been studied to realize high-density and low-electric-resistance stretchable interconnects. This study proposed a new method for fabricating vertical wavy structured metal interconnects that comprises the pre-stretch method and the micro-corrug...

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Detalles Bibliográficos
Autores principales: Yamamoto, Michitaka, Okuda, Shinji, Takamatsu, Seiichi, Itoh, Toshihiro
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9414042/
https://www.ncbi.nlm.nih.gov/pubmed/36014131
http://dx.doi.org/10.3390/mi13081210

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9414042/
https://www.ncbi.nlm.nih.gov/pubmed/36014131
http://dx.doi.org/10.3390/mi13081210

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