Real-Time Reflectance Measurement Using an Astigmatic Optical Profilometer

An astigmatic optical profilometer with a commercial optical pickup head provides benefits, such as high resolution, compact size, and low cost. To eliminate artifacts caused by complex materials with different reflectances, a z-axis modulation mode is proposed to obtain quantitative surface morphol...

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Detalles Bibliográficos
Autores principales: Liao, Hsien-Shun, Huang, Ya-Kang, Syu-Gu, Jian-Yuan, Hwu, En-Te
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9414481/
https://www.ncbi.nlm.nih.gov/pubmed/36016000
http://dx.doi.org/10.3390/s22166242

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9414481/
https://www.ncbi.nlm.nih.gov/pubmed/36016000
http://dx.doi.org/10.3390/s22166242

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