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Real-Time Reflectance Measurement Using an Astigmatic Optical Profilometer
An astigmatic optical profilometer with a commercial optical pickup head provides benefits, such as high resolution, compact size, and low cost. To eliminate artifacts caused by complex materials with different reflectances, a z-axis modulation mode is proposed to obtain quantitative surface morphol...
Autores principales: | Liao, Hsien-Shun, Huang, Ya-Kang, Syu-Gu, Jian-Yuan, Hwu, En-Te |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9414481/ https://www.ncbi.nlm.nih.gov/pubmed/36016000 http://dx.doi.org/10.3390/s22166242 |
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