Integrated Amplitude and Phase Monitor for Micro-Actuators

Micro-actuators driven on resonance maximize reach and speed; however, due to their sensitivity to environmental factors (e.g., temperature and air pressure), the amplitude and phase response must be monitored to achieve an accurate actuator position. We introduce an MEMS (microelectromechanical sys...

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Detalles Bibliográficos
Autores principales: Manosalvas-Kjono, Sandra Nicole, Quan, Ronald, Solgaard, Olav
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9415144/
https://www.ncbi.nlm.nih.gov/pubmed/36014282
http://dx.doi.org/10.3390/mi13081360

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9415144/
https://www.ncbi.nlm.nih.gov/pubmed/36014282
http://dx.doi.org/10.3390/mi13081360

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