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Development of a Flexible MEMS Sensor for Subsonic Flow

Detection and control of flow separation is a key to improving the efficiency of fluid machinery. In this study, we developed a flexible MEMS (microelectromechanical systems) sensor for measuring the wall shear stress and flow angle in subsonic airflow. The developed sensor is made of a flexible pol...

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Detalles Bibliográficos
Autores principales:	Murakami, Koichi, Shiraishi, Daiki, Mizumi, Shunsuke, Oya, Yoshiko, Omura, Naoto, Shibata, Takanori, Ichikawa, Yoshiyasu, Motosuke, Masahiro
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9415156/ https://www.ncbi.nlm.nih.gov/pubmed/36014221 http://dx.doi.org/10.3390/mi13081299

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