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Design and Fabrication of Millimeter-Wave Frequency-Tunable Metamaterial Absorber Using MEMS Cantilever Actuators

In this paper, a MEMS (Micro Electro Mechanical Systems)-based frequency-tunable metamaterial absorber for millimeter-wave application was demonstrated. To achieve the resonant-frequency tunability of the absorber, the unit cell of the proposed metamaterial was designed to be a symmetric split-ring...

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Autores principales: Chung, Myungjin, Jeong, Heijun, Kim, Yong-Kweon, Lim, Sungjoon, Baek, Chang-Wook
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9415678/
https://www.ncbi.nlm.nih.gov/pubmed/36014276
http://dx.doi.org/10.3390/mi13081354
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author Chung, Myungjin
Jeong, Heijun
Kim, Yong-Kweon
Lim, Sungjoon
Baek, Chang-Wook
author_facet Chung, Myungjin
Jeong, Heijun
Kim, Yong-Kweon
Lim, Sungjoon
Baek, Chang-Wook
author_sort Chung, Myungjin
collection PubMed
description In this paper, a MEMS (Micro Electro Mechanical Systems)-based frequency-tunable metamaterial absorber for millimeter-wave application was demonstrated. To achieve the resonant-frequency tunability of the absorber, the unit cell of the proposed metamaterial was designed to be a symmetric split-ring resonator with a stress-induced MEMS cantilever array having initial out-of-plane deflections, and the cantilevers were electrostatically actuated to generate a capacitance change. The dimensional parameters of the absorber were determined via impedance matching using a full electromagnetic simulation. The designed absorber was fabricated on a glass wafer with surface micromachining processes using a photoresist sacrificial layer and the oxygen-plasma-ashing process to release the cantilevers. The performance of the fabricated absorber was experimentally validated using a waveguide measurement setup. The absorption frequency shifted down according to the applied DC (direct current) bias voltage from 28 GHz in the initial off state to 25.5 GHz in the pull-down state with the applied voltage of 15 V. The measured reflection coefficients at those frequencies were −5.68 dB and −33.60 dB, corresponding to the peak absorptivity rates of 72.9 and 99.9%, respectively.
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spelling pubmed-94156782022-08-27 Design and Fabrication of Millimeter-Wave Frequency-Tunable Metamaterial Absorber Using MEMS Cantilever Actuators Chung, Myungjin Jeong, Heijun Kim, Yong-Kweon Lim, Sungjoon Baek, Chang-Wook Micromachines (Basel) Article In this paper, a MEMS (Micro Electro Mechanical Systems)-based frequency-tunable metamaterial absorber for millimeter-wave application was demonstrated. To achieve the resonant-frequency tunability of the absorber, the unit cell of the proposed metamaterial was designed to be a symmetric split-ring resonator with a stress-induced MEMS cantilever array having initial out-of-plane deflections, and the cantilevers were electrostatically actuated to generate a capacitance change. The dimensional parameters of the absorber were determined via impedance matching using a full electromagnetic simulation. The designed absorber was fabricated on a glass wafer with surface micromachining processes using a photoresist sacrificial layer and the oxygen-plasma-ashing process to release the cantilevers. The performance of the fabricated absorber was experimentally validated using a waveguide measurement setup. The absorption frequency shifted down according to the applied DC (direct current) bias voltage from 28 GHz in the initial off state to 25.5 GHz in the pull-down state with the applied voltage of 15 V. The measured reflection coefficients at those frequencies were −5.68 dB and −33.60 dB, corresponding to the peak absorptivity rates of 72.9 and 99.9%, respectively. MDPI 2022-08-20 /pmc/articles/PMC9415678/ /pubmed/36014276 http://dx.doi.org/10.3390/mi13081354 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Chung, Myungjin
Jeong, Heijun
Kim, Yong-Kweon
Lim, Sungjoon
Baek, Chang-Wook
Design and Fabrication of Millimeter-Wave Frequency-Tunable Metamaterial Absorber Using MEMS Cantilever Actuators
title Design and Fabrication of Millimeter-Wave Frequency-Tunable Metamaterial Absorber Using MEMS Cantilever Actuators
title_full Design and Fabrication of Millimeter-Wave Frequency-Tunable Metamaterial Absorber Using MEMS Cantilever Actuators
title_fullStr Design and Fabrication of Millimeter-Wave Frequency-Tunable Metamaterial Absorber Using MEMS Cantilever Actuators
title_full_unstemmed Design and Fabrication of Millimeter-Wave Frequency-Tunable Metamaterial Absorber Using MEMS Cantilever Actuators
title_short Design and Fabrication of Millimeter-Wave Frequency-Tunable Metamaterial Absorber Using MEMS Cantilever Actuators
title_sort design and fabrication of millimeter-wave frequency-tunable metamaterial absorber using mems cantilever actuators
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9415678/
https://www.ncbi.nlm.nih.gov/pubmed/36014276
http://dx.doi.org/10.3390/mi13081354
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