Vibrating Flexoelectric Micro-Beams as Angular Rate Sensors

We studied flexoelectrically excited/detected bending vibrations in perpendicular directions of a micro-beam spinning about its axis. A set of one-dimensional equations was derived and used in a theoretical analysis. It is shown that the Coriolis effect associated with the spin produces an electrica...

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Detalles Bibliográficos
Autores principales: Qu, Yilin, Jin, Feng, Yang, Jiashi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9415679/
https://www.ncbi.nlm.nih.gov/pubmed/36014164
http://dx.doi.org/10.3390/mi13081243
_version_ 1784776290442674176
author Qu, Yilin
Jin, Feng
Yang, Jiashi
author_facet Qu, Yilin
Jin, Feng
Yang, Jiashi
author_sort Qu, Yilin
collection PubMed
description We studied flexoelectrically excited/detected bending vibrations in perpendicular directions of a micro-beam spinning about its axis. A set of one-dimensional equations was derived and used in a theoretical analysis. It is shown that the Coriolis effect associated with the spin produces an electrical output proportional to the angular rate of the spin when it is small. Thus, the beam can be used as a gyroscope for angular rate sensing. Compared to conventional piezoelectric beam gyroscopes, the flexoelectric beam proposed and analyzed has a simpler structure.
format Online
Article
Text
id pubmed-9415679
institution National Center for Biotechnology Information
language English
publishDate 2022
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-94156792022-08-27 Vibrating Flexoelectric Micro-Beams as Angular Rate Sensors Qu, Yilin Jin, Feng Yang, Jiashi Micromachines (Basel) Article We studied flexoelectrically excited/detected bending vibrations in perpendicular directions of a micro-beam spinning about its axis. A set of one-dimensional equations was derived and used in a theoretical analysis. It is shown that the Coriolis effect associated with the spin produces an electrical output proportional to the angular rate of the spin when it is small. Thus, the beam can be used as a gyroscope for angular rate sensing. Compared to conventional piezoelectric beam gyroscopes, the flexoelectric beam proposed and analyzed has a simpler structure. MDPI 2022-08-02 /pmc/articles/PMC9415679/ /pubmed/36014164 http://dx.doi.org/10.3390/mi13081243 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Qu, Yilin
Jin, Feng
Yang, Jiashi
Vibrating Flexoelectric Micro-Beams as Angular Rate Sensors
title Vibrating Flexoelectric Micro-Beams as Angular Rate Sensors
title_full Vibrating Flexoelectric Micro-Beams as Angular Rate Sensors
title_fullStr Vibrating Flexoelectric Micro-Beams as Angular Rate Sensors
title_full_unstemmed Vibrating Flexoelectric Micro-Beams as Angular Rate Sensors
title_short Vibrating Flexoelectric Micro-Beams as Angular Rate Sensors
title_sort vibrating flexoelectric micro-beams as angular rate sensors
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9415679/
https://www.ncbi.nlm.nih.gov/pubmed/36014164
http://dx.doi.org/10.3390/mi13081243
work_keys_str_mv AT quyilin vibratingflexoelectricmicrobeamsasangularratesensors
AT jinfeng vibratingflexoelectricmicrobeamsasangularratesensors
AT yangjiashi vibratingflexoelectricmicrobeamsasangularratesensors

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