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Deposition Mechanism and Characterization of Plasma-Enhanced Atomic Layer-Deposited SnO(x) Films at Different Substrate Temperatures

The promising functional tin oxide (SnO(x)) has attracted tremendous attention due to its transparent and conductive properties. The stoichiometric composition of SnO(x) can be described as common n-type SnO(2) and p-type Sn(3)O(4). In this study, the functional SnO(x) films were prepared successful...

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Detalles Bibliográficos
Autores principales:	Huang, Pao-Hsun, Zhang, Zhi-Xuan, Hsu, Chia-Hsun, Wu, Wan-Yu, Ou, Sin-Liang, Huang, Chien-Jung, Wuu, Dong-Sing, Lien, Shui-Yang, Zhu, Wen-Zhang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9416374/ https://www.ncbi.nlm.nih.gov/pubmed/36014724 http://dx.doi.org/10.3390/nano12162859

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