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Multi-step proportional miniaturization to sub-micron dimensions using pre-stressed polymer films
The ability to define patterns and fabricate structures at the nanoscale in a scalable manner is crucial not only in integrated circuit fabrication but also in fabrication of nanofluidic devices as well as in nano and micromechanical systems. Top down fabrication at the nanoscale often involves fabr...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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RSC
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9418490/ https://www.ncbi.nlm.nih.gov/pubmed/36132054 http://dx.doi.org/10.1039/d0na00785d |