Tailoring the crystal growth of quartz on silicon for patterning epitaxial piezoelectric films

Epitaxial films of piezoelectric α-quartz could enable the fabrication of sensors with unprecedented sensitivity for prospective applications in electronics, biology and medicine. However, the prerequisites are harnessing the crystallization of epitaxial α-quartz and tailoring suitable film microstr...

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Detalles Bibliográficos
Autores principales: Zhang, Qianzhe, Sánchez-Fuentes, David, Gómez, Andrés, Desgarceaux, Rudy, Charlot, Benoit, Gàzquez, Jaume, Carretero-Genevrier, Adrián, Gich, Martí
Formato: Online Artículo Texto
Lenguaje:English
Publicado: RSC 2019
Materias:
Chemistry
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9419616/
https://www.ncbi.nlm.nih.gov/pubmed/36133542
http://dx.doi.org/10.1039/c9na00388f

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9419616/
https://www.ncbi.nlm.nih.gov/pubmed/36133542
http://dx.doi.org/10.1039/c9na00388f

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