Cargando…
Tailoring the crystal growth of quartz on silicon for patterning epitaxial piezoelectric films
Epitaxial films of piezoelectric α-quartz could enable the fabrication of sensors with unprecedented sensitivity for prospective applications in electronics, biology and medicine. However, the prerequisites are harnessing the crystallization of epitaxial α-quartz and tailoring suitable film microstr...
| Autores principales: | , , , , , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
RSC
2019
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9419616/ https://www.ncbi.nlm.nih.gov/pubmed/36133542 http://dx.doi.org/10.1039/c9na00388f |