Miniaturized CO(2) Gas Sensor Using 20% ScAlN-Based Pyroelectric Detector

[Image: see text] NDIR CO(2) gas sensors using a 10-cm-long gas channel and CMOS-compatible 12% doped ScAlN pyroelectric detector have previously demonstrated detection limits down to 25 ppm and fast response time of ∼2 s. Here, we increase the doping concentration of Sc to 20% in our ScAlN-based py...

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Detalles Bibliográficos
Autores principales: Ng, Doris Keh Ting, Xu, Linfang, Chen, Weiguo, Wang, Huanhuan, Gu, Zhonghua, Chia, Xavier Xujie, Fu, Yuan Hsing, Jaafar, Norhanani, Ho, Chong Pei, Zhang, Tantan, Zhang, Qingxin, Lee, Lennon Yao Ting
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2022
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9425554/
https://www.ncbi.nlm.nih.gov/pubmed/35943904
http://dx.doi.org/10.1021/acssensors.2c00980

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