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Tuning of silicon nitride micro-cavities by controlled nanolayer deposition
Integration of single-photon emitters (SPEs) with resonant photonic structures is a promising approach for realizing compact and efficient single-photon sources for quantum communications, computing, and sensing. Efficient interaction between the SPE and the photonic cavity requires that the cavity&...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9445027/ https://www.ncbi.nlm.nih.gov/pubmed/36064960 http://dx.doi.org/10.1038/s41598-022-19255-9 |