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A Study of Optimizing Lamb Wave Acoustic Mass Sensors’ Performance through Adjustment of the Transduction Electrode Metallization Ratio
This paper presents the design and simulation of a mass sensitive Lamb wave microsensor with CMOS technology provided by SilTerra. In this work, the effects of the metalization ratio variation on the transmission gain, total harmonic distortion (THD), and two different resonant modes (around 66 MHz...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9460037/ https://www.ncbi.nlm.nih.gov/pubmed/36080886 http://dx.doi.org/10.3390/s22176428 |
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author | Gholami, Fatemeh Shih, Andy Robichaud, Alexandre Cicek, Paul-Vahe |
author_facet | Gholami, Fatemeh Shih, Andy Robichaud, Alexandre Cicek, Paul-Vahe |
author_sort | Gholami, Fatemeh |
collection | PubMed |
description | This paper presents the design and simulation of a mass sensitive Lamb wave microsensor with CMOS technology provided by SilTerra. In this work, the effects of the metalization ratio variation on the transmission gain, total harmonic distortion (THD), and two different resonant modes (around 66 MHz and 86 MHz) are shown. It has been found that the metalization ratio can be adjusted in order to obtain a compromise between transmission gain and sensitivity, depending on the design criteria. By adding a Si [Formula: see text] N [Formula: see text] layer on top of the device, a five-fold improvement in transmission gain is reached. It was also shown that the transmission of the input differential IDT configuration is 20% more efficient than a single terminal. With this combination, the mass sensitivity is about 114 [cm [Formula: see text] /gr]. |
format | Online Article Text |
id | pubmed-9460037 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2022 |
publisher | MDPI |
record_format | MEDLINE/PubMed |
spelling | pubmed-94600372022-09-10 A Study of Optimizing Lamb Wave Acoustic Mass Sensors’ Performance through Adjustment of the Transduction Electrode Metallization Ratio Gholami, Fatemeh Shih, Andy Robichaud, Alexandre Cicek, Paul-Vahe Sensors (Basel) Article This paper presents the design and simulation of a mass sensitive Lamb wave microsensor with CMOS technology provided by SilTerra. In this work, the effects of the metalization ratio variation on the transmission gain, total harmonic distortion (THD), and two different resonant modes (around 66 MHz and 86 MHz) are shown. It has been found that the metalization ratio can be adjusted in order to obtain a compromise between transmission gain and sensitivity, depending on the design criteria. By adding a Si [Formula: see text] N [Formula: see text] layer on top of the device, a five-fold improvement in transmission gain is reached. It was also shown that the transmission of the input differential IDT configuration is 20% more efficient than a single terminal. With this combination, the mass sensitivity is about 114 [cm [Formula: see text] /gr]. MDPI 2022-08-26 /pmc/articles/PMC9460037/ /pubmed/36080886 http://dx.doi.org/10.3390/s22176428 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
spellingShingle | Article Gholami, Fatemeh Shih, Andy Robichaud, Alexandre Cicek, Paul-Vahe A Study of Optimizing Lamb Wave Acoustic Mass Sensors’ Performance through Adjustment of the Transduction Electrode Metallization Ratio |
title | A Study of Optimizing Lamb Wave Acoustic Mass Sensors’ Performance through Adjustment of the Transduction Electrode Metallization Ratio |
title_full | A Study of Optimizing Lamb Wave Acoustic Mass Sensors’ Performance through Adjustment of the Transduction Electrode Metallization Ratio |
title_fullStr | A Study of Optimizing Lamb Wave Acoustic Mass Sensors’ Performance through Adjustment of the Transduction Electrode Metallization Ratio |
title_full_unstemmed | A Study of Optimizing Lamb Wave Acoustic Mass Sensors’ Performance through Adjustment of the Transduction Electrode Metallization Ratio |
title_short | A Study of Optimizing Lamb Wave Acoustic Mass Sensors’ Performance through Adjustment of the Transduction Electrode Metallization Ratio |
title_sort | study of optimizing lamb wave acoustic mass sensors’ performance through adjustment of the transduction electrode metallization ratio |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9460037/ https://www.ncbi.nlm.nih.gov/pubmed/36080886 http://dx.doi.org/10.3390/s22176428 |
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