A Study of Optimizing Lamb Wave Acoustic Mass Sensors’ Performance through Adjustment of the Transduction Electrode Metallization Ratio

This paper presents the design and simulation of a mass sensitive Lamb wave microsensor with CMOS technology provided by SilTerra. In this work, the effects of the metalization ratio variation on the transmission gain, total harmonic distortion (THD), and two different resonant modes (around 66 MHz...

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Detalles Bibliográficos
Autores principales: Gholami, Fatemeh, Shih, Andy, Robichaud, Alexandre, Cicek, Paul-Vahe
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9460037/
https://www.ncbi.nlm.nih.gov/pubmed/36080886
http://dx.doi.org/10.3390/s22176428

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9460037/
https://www.ncbi.nlm.nih.gov/pubmed/36080886
http://dx.doi.org/10.3390/s22176428

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