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A Study of Optimizing Lamb Wave Acoustic Mass Sensors’ Performance through Adjustment of the Transduction Electrode Metallization Ratio
This paper presents the design and simulation of a mass sensitive Lamb wave microsensor with CMOS technology provided by SilTerra. In this work, the effects of the metalization ratio variation on the transmission gain, total harmonic distortion (THD), and two different resonant modes (around 66 MHz...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9460037/ https://www.ncbi.nlm.nih.gov/pubmed/36080886 http://dx.doi.org/10.3390/s22176428 |