Research on Nonlinear Compensation of the MEMS Gyroscope under Tiny Angular Velocity

The Micro-Electro-Mechanical System (MEMS) gyroscope has been widely used in various fields, but the output of the MEMS gyroscope has strong nonlinearity, especially in the range of tiny angular velocity. This paper proposes an adaptive Fourier series compensation method (AFCM) based on the steepest descent method and Fourier series residual correction. The proposed method improves the Fourier series fitting method according to the output characteristics of the MEMS gyroscope under tiny angular velocity. Then, the optimal weights are solved by the steepest descent method, and finally the fitting residuals are corrected by Fourier series to further improve the compensation accuracy. In order to verify the effectiveness of the proposed method, the angle velocity component of the earth’s rotation is used as the input of the MEMS gyroscope to obtain the output of the MEMS gyroscope under tiny angular velocities. Experimental characterization resulted in an input angular velocity between −0.0036°/s and 0.0036°/s, compared with the original data, the polynomial compensation method, and the Fourier series compensation method, and the output nonlinearity of the MEMS gyroscope was reduced from 1150.87 ppm, 641.13 ppm, and 250.55 ppm to 68.89 ppm after AFCM compensation, respectively, which verifies the effectiveness and superiority of the proposed method.