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Chip Pad Inspection Method Based on an Improved YOLOv5 Algorithm

Chip pad inspection is of great practical importance for chip alignment inspection and correction. It is one of the key technologies for automated chip inspection in semiconductor manufacturing. When applying deep learning methods for chip pad inspection, the main problem to be solved is how to ensu...

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Detalles Bibliográficos
Autores principales:	Xu, Jiangjie, Zou, Yanli, Tan, Yufei, Yu, Zichun
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9460593/ https://www.ncbi.nlm.nih.gov/pubmed/36081144 http://dx.doi.org/10.3390/s22176685

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