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High-Frequency Surface Acoustic Wave Resonator with Diamond/AlN/IDT/AlN/Diamond Multilayer Structure

A high-frequency surface acoustic wave (SAW) resonator, based on sandwiched interdigital transducer (IDT), is presented. The resonator has the structure of diamond/AlN/IDT/AlN/diamond, with Si as the substrate. The results show that its phase velocity and electromechanical coupling coefficient are b...

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Detalles Bibliográficos
Autores principales:	Lei, Liang, Dong, Bo, Hu, Yuxuan, Lei, Yisong, Wang, Zhizhong, Ruan, Shuangchen
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9460613/ https://www.ncbi.nlm.nih.gov/pubmed/36080938 http://dx.doi.org/10.3390/s22176479

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