Research Report on the Application of MEMS Sensors Based on Copper Oxide Nanofibers in the Braking of Autonomous Vehicles

Herein, we report a novel nanofiber as a humidity sensor applied to autonomous vehicles. We prepared copper oxide nanofibers by electrospinning, characterized the obtained materials by XRD, SEM, and TEM, and fabricated MEMS sensors based on copper oxide nanofibers. The humidity sensitivity performance of the sensor was tested in different humidity environments. We found that the MEMS humidity sensor based on copper oxide nanofibers can detect the change of humidity in the environment over a large humidity range. Its fast response/mixing speed (1 s), good stability, and sensitivity make it to fully adapt to the high speed of the car.