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Effects of substrate bias on the sputtering of high density (111)-nanotwinned Cu films on SiC chips
This article presents a study of the influence of the substrate bias on the microstructure, preferred orientation, and mechanical and electrical properties of nanotwinned Cu film. The formation of a nanotwinned structure and (111) surface orientation can be properly controlled by applied substrate b...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9474521/ https://www.ncbi.nlm.nih.gov/pubmed/36104444 http://dx.doi.org/10.1038/s41598-022-19825-x |